Three Zones Tube Furnace (1200℃) with High Vacuum Station+ 4 Channel MFC Gas Station for CVD

Description：

The KJ-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 12

Specific Introduction:
The KJ-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.

Technical parameters:

OTF-1200X-III series tube furnace	Casing	Double-layer steel casing with air cooling. Built-in thermostat to control Cooling running automatically when case > 55°C.
	Processing Tube	Material: Fused quartz tube One processing tube is included with the furnace. Please select the tube size in the option bar to update the price.
	Heating Element	Fe-Cr-Al Alloy doped by Mo
	Working Temp.	Max. Heating Temp.: 1200°C Continuous Working Temp.: 1100°C
	Heat-up Rate	Heat-up rate: 1~20°C/min programmable
	Heating Zone Length	Total heating zone: 900mm (300mm + 300mm + 300mm)
	Temp. Controller	Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: ±1°C Thermocouple: K type built inside the furnace
	Vacuum Seal	One pair of stainless steel vacuum flange with: - one mechanical pressure gauge - two needle valves - one KF-40 connector for the high vacuum station.
High Vacuum Station	Structure	Mobile cart size: 600 (L) x 600 (W) x 700(H), mm Max. Loading: 600 Lbs on top Molecular pump control Panel: LCD digital Inside: Pfeiffer vacuum pump made in Germany Vacuum sensor is included
	Volume Flow Rate	Nitrogen N2 33 L/s Helium He 39 L/s (2340L/minute) Hydrogen H2 32 L/s
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	<1E-8 mbar (without any leaking )
Mass Flow Gas Control	Structure	2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software LED display 4 channel MFC Made of 316 stainless steel with gas flow range as below: Controller 1: 0~100SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM 4 Channel gas go through a Gas mixing tank: Φ80X120mm